RF generator · 13.56 MHz
Barracuda
Class E generator with CW and pulsed output as standard. Up to 5.5 kW in a half-rack, water-cooled chassis.
- 1.5 / 3 / 5.5 kW
- Rated output
- 150 Hz – 50 kHz
- Pulse frequency
- <10 ms
- RF-on response
- ≤ −45 dBc
- Harmonics
RF power for plasma processing
RF power for plasma
Generators, matches, sensors and filters. One RF path. For PECVD, etch, diffusion, ion source and sputter tools.
Scroll to power on ↓02Inside the Barracuda
CVS designs and builds RF power equipment for PECVD, etch, diffusion, ion source and sputter tools in semiconductor, photovoltaic and display manufacturing.
- TopologyClass ECW and pulsed output as standard
- Pulse frequency150 Hz – 50 kHz<10 ms RF-on response
- ChassisHalf-rack, water-cooledUp to 5.5 kW · ≤ −45 dBc harmonics
- 300 kHz – 13.56 MHz
- Generator frequencies
- 0.9 – 5.5 kW
- Generator power
- <2 s
- Match tune time
- 12 months
- Warranty
03How the products fit together
The RF
delivery path
- 01Generator
Barracuda · Snapper
Regulated RF power, CW or pulsed.
- 02Sensor (option)
Phase-X
Measures V, I, phase and load impedance.
- 03Match
Cruiser Solo · Duo
Transforms the plasma load to 50 Ω.
- 04Chamber
Plasma load
Electrode, pedestal, showerhead.
- 05RF filter
Heater · E-chuck · Faceplate
Keep RF off the chamber's heater and chuck supply lines.
04Product families
01 / 05
RF generator · 300–450 kHz
Snapper
MF-900 / MF-1250. Low-frequency generator with a built-in 7-tap output transformer that matches low-impedance plasma loads. Frequency adjustable from 300 to 450 kHz.
- 900 / 1250 W
- Rated output
- 10–125 Ω
- Output impedance
- ±1% or ±2 W
- Regulation
- 2U
- 19-inch rack
Automatic match networks
Cruiser
Solo: single-frequency 13.56 MHz matches from 1.6 to 10 kW. Duo: two matches with one output, 13.56 MHz with 400 kHz or 2 MHz. Tuning range configured to the chamber. Optional built-in Phase-X sensor.
- <2 s
- Tune time
- <1 s
- From preset
- 1.6 – 10 kW
- Solo input power
- 13.56 MHz ±5%
- Frequency band
In-line V-I sensor · 400 kHz – 13.56 MHz
Phase-X
Measures voltage, current, phase and load impedance at the chamber in real time. A microsecond-level TTL trigger gives the tool fast feedback for closed-loop control, including an endpoint signal for low open-area etch.
- 1–1000 Vrms
- Voltage range
- 0.1–35 Arms
- Current range
- ±0.3°
- Phase accuracy
- ±2%
- Power accuracy, 0–30°
LC low-pass filters · 400 kHz and 13.56 MHz
RF filters
Keep RF energy off heater, electrostatic chuck and faceplate supply lines. All models monitor common-mode noise and protect against over-temperature.
- ≥30 dB
- at 13.56 MHz
- ≥10 dB
- at 400 kHz
- 1 – 3
- Channels
- 2000 VDC
- Withstand, 1 min
Connectors, communication protocol, tuning range and enclosure size are configured to the customer's tool.
05Company
Built in Shanghai. Running on PECVD tools in production.
CVS Precision Technologies (上海世炜科技有限公司) designs and builds RF power conversion equipment in Shanghai. Our products run on PECVD tools in production, and they replace installed Advanced Energy Apex and PDX units.
International sales: CVS Precision Technologies, Ltd., Colorado, USA.
- 2026
- Founded
- 1500 m²
- Plant, Fengxian, Shanghai
- 40 units
- Installed on 10 PECVD tools
- Jiangyin · Wuxi
- Service locations
06Ordering and service
Built to run.
Backed when it doesn't.
Warranty from shipment.
Standard lead time.
Repair turnaround.
Operation manuals, outline drawings, 3D models and test reports on request.
07Contact
Talk to an RF applications engineer about your chamber.
Send the tool model, chamber process and the RF unit you use today. We reply within one working day.
Sales
sales@cvs-precision.com
Phone
+86 139 2654 4148
Factory
上海世炜科技有限公司
3F, Building 9, Block 1, No. 288 Huifeng North Road
Fengxian District, Shanghai, China
3F, Building 9, Block 1, No. 288 Huifeng North Road
Fengxian District, Shanghai, China